铝纳米涂层对镍丝键合性能的改进

R. Klengel, S. Klengel, J. Schischka, G. Lorenz, M. Petzold
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引用次数: 1

摘要

近年来,作为高温应用或电力电子元件的接触技术,镍丝键合引起了人们的兴趣。除了高的热稳定性外,镍线的另一个优点是其良好的导电性和高的机械强度。另一方面,电线的相对高硬度带来了形成缺陷的风险,特别是如果应用于半导体元件的粘接。本研究试图通过溅射纳米厚的铝层来改善结合工艺参数,以降低结合力,从而支持结合机制。本文研究了金属丝溅射前后的力学特性,铝溅射层在金属丝上的形貌和粘附行为,以及不同金属化方式下楔-楔键合后金属丝键合界面的接触形成。进行了拉伸试验和纳米压痕等力学测试方法,以及聚焦离子束技术(FIB)、扫描电子显微镜(SEM)和透射电子显微镜(TEM)等高分辨率制备和分析方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Improvement of nickel wire bonding using Al nano coating
In recent years Ni wire bonding has found some interest as a contacting technology for high temperature applications or for power electronic components. In addition to high thermal stability, further advantageous properties of Ni wires are its good electrical conductivity and a high mechanical strength. On the other hand, the relatively high hardness of the wires entails the risk of defect formation, particularly if applied for bonding on semiconductor components. In the presented investigation it was tried to improve the bond process parameters to lower bond forces by sputtering the wire with nm thick aluminum layer which should support the binding mechanisms. The paper presents mechanical characterization of the wire before and after sputtering, morphology and adhesion behavior of Al sputter layer on the wire as well as the contact formation in the wire bond interface after wedge-wedge bonding on different metallization. Mechanical test methods like tensile test and nano-indentation were performed as well as high resolution preparation and analyzes methods like focused ion beam technique (FIB), scanning electron microscopy (SEM) and transmission electron microscopy (TEM).
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