高速微处理器的智能良率预测模型

Tae Seon Kim, Se-Hwan Ahn, Y. Jang, Jeong In Lee, Kil Jae Lee, B. Kim, Chang Hyun Cho
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引用次数: 1

摘要

建立了基于神经网络的良率预测模型,对高速微处理器制造工艺进行优化。基于实测的60个ET(电测试)数据,建立了晶圆级参数良率预测模型。在本研究中,由于良率对整体制造成本和产品质量至关重要,因此将良率作为一种制造绩效指标。与多元回归统计预测模型相比,预测结果提高了41.09%。这些建模方法也适用于预测最终芯片速度,以尽量减少不必要的封装成本。预测结果仅显示平均速度差异的1.7%。最终,这些神经预测模型被用于寻找最优的工艺条件,并且随着这项工作的成功实施,它可以作为提高生产率和芯片质量的催化剂。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Intelligent yield prediction models for high-speed microprocessors
Neural network based yield prediction models are developed to optimize high-speed microprocessor manufacturing processes. Based on measured sixty ET (electrical test) data, wafer level parametric yield prediction models are developed. In this work, manufacturing yield was considered as a manufacturing performance index because it is very critical to overall manufacturing cost and product quality. The prediction results show 41.09% improvement as compared to statistical prediction model using multiple regression. These modeling approaches are also applied to predict final chip speed to minimize undesirable packaging costs. The prediction results show only 1.7% of average speed differences. Ultimately, these neural prediction models are used to find optimal process conditions, and with the successful implementation of this work, it can serve as a catalyst to improve productivity and chip quality.
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