用于w波段应用的宽带微机械天线

A. Bunea, D. Neculoiu, A. Avram, M. Iovea
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引用次数: 2

摘要

本文提出了一种采用共面波导馈电的3x1折槽天线,该天线采用硅衬底的深度反应离子刻蚀法制备介质膜。天线放置在金属化硅芯片上,保证了良好的机械稳定性和高增益。所得结构的输入匹配带宽在76 - 100 GHz之间,在94 GHz时增益为10.5 dBi。该芯片的尺寸为6.7 × 7.2 × 1.3 mm。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Wideband Micromachined Antenna for W-band Applications
The paper proposes a 3x1 folded slot antenna with a coplanar waveguide feed, processed on a dielectric membrane fabricated through the Deep Reactive Ion Etching of a silicon substrate. The antenna is placed on a metallized silicon chip ensuring good mechanical stability and high gain. The resulting structure has an input matching bandwidth between 76 – 100 GHz, with a gain of 10.5 dBi at 94 GHz. The size of the fabricated chip is 6.7$\times$7.2$\times$1.3 mm$^{3}$.
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