AlGaN/GaN异质结构场效应晶体管的可靠性问题

J. Škriniarová, M. Florovič, J. Kováč, D. Donoval, P. Kordos
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引用次数: 0

摘要

通过施加短时间(70分钟)的非状态应力(漏极电压为50 V,通道被掐断)来研究AlGaN/GaN hfet的可靠性。在应力条件下,漏极电流明显减小。同时,栅极电流减小。另一方面,跨导和阈值电压不随应力时间的变化而变化。在应力过程中肖特基势垒的改变被认为可以解释这种行为。在栅极沉积前的AlGaN表面制备过程中产生的近表面缺陷,由于施加了高电场应力而被抑制。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reliability issues of AlGaN/GaN heterostructures field-effect transistors
Reliability of the AlGaN/GaN HFETs was investigated by applying a short-time (70 min) off-state stress: the drain voltage was 50 V and the channel was pinched off. Significant decrease of the drain current at the stressing conditions was observed. Simultaneously, a decrease of the gate currents was found. On the other hand, the transconductance and threshold voltage did not changed with the stressing time. A modification of the Schottky barrier during the stress is considered to explain this behaviour. Near-surface defects, created during the AlGaN surface preparation before the gate deposition, were suppressed as a result of performed high-electric-field stress.
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