掺杂剂变化对无结圆柱纳米线场效应管的影响

Ankush Chattopadhyay, Ankita Pathak, P. Mukherjee
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引用次数: 2

摘要

本文介绍了无结硅纳米线场效应管掺杂谱变化的影响。利用Silvaco TCAD进行了三维仿真,分析了所提出器件的特性。根据源区、底区和漏区掺杂谱的变化,进行了详细的研究。假设高斯和均匀掺杂分布交替控制源/漏极和衬底中的载流子浓度。基于传输特性、跨导、阈值电压、通断电流比、固有电容和截止频率对器件的模拟性能进行了评估。该研究以定量数据得出结论,证明了具有上述变化的设备的可接受性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Impact of Dopant variations on Junctionless Cylindrical Nanowire FETs
This paper presents the effects of variations in doping profile of a junctionless silicon nanowire FET. 3-D simulations are performed using Silvaco TCAD for analyzing the characteristics of the proposed device. A detailed investigation has been reported, based on variants of doping profiles in source, substrate and drain regions. Gaussian and uniform doping profiles are assumed to govern the carrier concentrations in source/drain and substrate alternatively. The analog performances of the devices have been evaluated based on transfer characteristics, transconductance, threshold voltage, on-off current ratio, intrinsic capacitances and cut-off frequency. The study concludes with quantitative data that justifies the acceptability of a device with the aforesaid variation.
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