电子互连用Sn-Ag-Cu钎料合金的电沉积

Y. Qin, Changqing Liu, G. Wilcox, K. Zhao, Changhai Wang
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引用次数: 1

摘要

研究了近共晶Sn-Ag-Cu合金的电沉积方法,该合金是一种很有前途的电子互连无铅钎料。浴液中含有焦磷酸盐和碘化物作为螯合剂。用波长色散x射线光谱(WDS)测定了镀层的组成。利用扫描电子显微镜(SEM)分析了沉积膜的不同形貌。x射线衍射(XRD)数据表明,“电镀”膜中存在Sn、Ag3Sn和Cu6Sn5。在玻璃测试晶片上证明,该镀液能够产生细间距近共晶Sn-Ag-Cu焊料凸起。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electrodeposition of Sn-Ag-Cu solder alloy for electronics interconnection
A pyrophosphate and iodide based bath was investigated for the electrodeposition of near-eutectic Sn-Ag-Cu alloy, which is one of the promising lead-free solder candidates for electronics interconnection. The bath contained pyrophosphate and iodide as chelating agents. The composition of electrodeposits were measured by wavelength dispersive X-ray Spectroscopy (WDS). Different morphologies of deposited films were analysed using scanning electron microscopy (SEM). X-ray diffraction (XRD) data indicated that Sn, Ag3Sn and Cu6Sn5 were present in the “as-electroplated” film. The proposed bath was capable of fine pitch near-eutectic Sn-Ag-Cu solder bumps as demonstrated on a glass test wafer.
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