二硫化钼应变传感器可靠性的原位透射电镜研究

C. Luo, Chaolun Wang, Shuo Ma, F. Liang, Zeiwei Luo, Xing Wu, J. Chu
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引用次数: 1

摘要

外应变作用下柔性装置的可靠性是一个重要问题。弄清结构在外部应变作用下的复杂演化过程,对于提高结构的基本物理认识和可靠性至关重要。然而,由于缺乏演化过程的方向和结构与电性能关系的构建,柔性器件的失效机理仍存在争议。本文利用原位透射电镜(TEM)直接观察了MoS2应变传感器在拉伸和压缩过程中的结构演变。通过分析电学性能与结构的关系,观察到与界面结构相关的逐渐和突然的电阻变化。在拉伸过程中形成扭曲和缺陷的二硫化钼层是重要的。形成的扭曲二硫化钼层改变了电流路径,电阻连续变化。然后,二硫化钼被机械剥离成两个独立的个体,在界面处扭曲的二硫化钼被原位去除。通过控制两个独立MoS2之间的距离,电流有一个突然的变化。原位电透射电镜实验明确了电流(电阻)与界面结构的关系。为理解外应变作用下的复杂演化机理提供了实验依据,对提高柔性装置的可靠性具有重要意义。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
In situ transmission electron microscope study of reliability in molybdenum disulfide based strain sensors
Reliability of flexible device under external strain is an important issue. The clarification of complex evolution of structure under external strain is critical for basic physical understanding and reliability improvement. However, lack of the direction of the evolution process and the construction of the relationship between structure and electrical properties, the failure mechanism of flexible device remains controversial. Here, in situ transmission electron microscope (TEM) is used to directly observe the structural evolution during stretching and compression process in MoS2 based strain sensor. Through the analysis of the relationship between electrical properties and structure, the interfacial structure related gradual and abrupt resistance changes are observed. The formation of twisted and defected MoS2 layers during stretching process is important. The formed twisted MoS2 layers changes the current path, the resistance changes continuously. Then, the MoS2 is mechanically peeled off into two separate individuals, and the twisted MoS2 at the interface is removed in situ. By controlling the distance between two separate MoS2, the current has a sudden change. The in situ electrical TEM experiment clarified the relationship between the current (resistance) and the interface structure. It provides the experimental basis for the understanding of complex evolution mechanism under external strain, which is important for reliability of flexible device.
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