单片InGaN/GaN盘纳米线在(001)硅上电泵浦边发射绿色(λ=533 nm)激光器

S. Jahangir, T. Frost, E. Stark, S. Deshpande, P. Bhattacharya
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引用次数: 3

摘要

由于需要在硅CMOS芯片上实现光子元件,并最终实现光通信系统,硅光子学已经承担了越来越重要的程度。虽然硅基探测器,波导和调制器已经出现了卓越的性能水平,但在(001)Si衬底上演示合适的电泵浦单片激光器仍然难以实现。基于砷化镓的量子阱和量子点激光器,发射波长范围为1.0-1.3 μm,但这些器件必须在取向错误的衬底上生长[(001)→4°to(111)]以防止反相畴。大的晶格错配引起的位错密度使其长期可靠性受到质疑。基于硅衬底的III-V基激光器是另一种已经取得一定程度成功的技术。研究了在错切基质和新型缓冲层上的生长。Ga(In)N纳米线和InGaN/GaN盘状纳米线异质结构可以在(001)Si上生长,相对没有扩展缺陷。纳米线沿c轴以纤锌矿晶体形式生长。由于外延过程中应变的径向松弛,与量子阱相比,异质结构中的极化场非常小。纳米线侧壁表面复合速度为~ 103 cm/s。已经证明了InGaN纳米线和InGaN/GaN盘在400-700 nm范围内的发射。在这里,我们首次展示了单片InGaN/GaN盘纳米线在(001)Si上的室温电注入边缘发射绿色激光器(λ=533nm)的特性。通过改变InGaN磁盘中的In含量,也可以实现发射波长较长或较短的纳米线激光器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A monolithic InGaN/GaN disk-in-nanowire electrically pumped edge-emitting green (λ=533 nm) laser on (001) silicon
Silicon photonics has assumed an increasing degree of importance due to the necessity of realizing photonic components, and ultimately optical communication systems, on silicon CMOS chips. While silicon based detectors, waveguides, and modulators have emerged with superior levels of performance, the demonstration of a suitable electrically pumped monolithic laser on (001) Si substrate has remained elusive. GaAs-based quantum well and quantum dot lasers, emitting in the wavelength range of 1.0-1.3 μm have been reported by us and others, but these devices have to be grown on misoriented substrates [(001)→4° towards (111)] to prevent antiphase domains. The large lattice mismatch induced dislocation density makes the long term reliability questionable. III-V based lasers bonded on silicon substrates is another technology that has been pursued with some degree of success. Growth on miscut substrates and with novel buffer layers have been investigated. Ga(In)N nanowires and InGaN/GaN disk-in-nanowire heterostractures can be grown relatively free of extended defects on (001) Si. The nanowires grow in the wurtzite crystalline form along the c-axis. Due to the radial relaxation of strain during epitaxy, the polarization field in the heterostractures is very small, compared to quantum wells. The surface recombination velocity on the nanowire sidewalls is ~ 103 cm/s. Emission in the range of 400-700 nm for InGaN nanowires and InGaN/GaN disks has been demonstrated. We demonstrate here, for the first time, the characteristics of a monolithic InGaN/GaN disk-in-nanowire room temperature electrically injected edge-emitting green laser (λ=533nm) on (001) Si. Nanowire lasers emitting at longer or shorter wavelengths can also be realized by varying the In content in the InGaN disks.
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