用于折射气体传感应用的集成氮化硅水平长周期光栅

2020 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) Pub Date : 2020-05-01 DOI:10.1109/I2MTC43012.2020.9129170

Clément Deleau, H. Seat, H. Tap, F. Surre, O. Bernal

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引用次数: 2

摘要

我们设计了一种基于氮化硅通道波导水平周期性变细的集成长周期光栅。以苯乙烯-丙烯腈为敏感层，研究了该结构在气敏应用中的应用。仿真结果表明，采用以1550 nm为中心的波长询问方法，对20pm大和300pm长的结构具有超过1700 nm/RIU的高灵敏度。

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Integrated Silicon Nitride Horizontal Long Period Grating for Refractometric Gas Sensing applications

We designed an integrated long period grating based on the horizontal periodic tapering of a silicon nitride channel waveguide. The structure is studied for gas sensing applications, using Styrene AcryloNitrile as sensitive layer. Simulation results from the proposed architecture show a high sensitivity beyond 1700 nm/RIU using a wavelength interrogation method centered at 1550 nm for a 20pm large and 300pm long structure.

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2020 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)

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