在Ti扩散过程中蚀刻实现了z-cut、5mol % mg掺杂、全等LiNbO3的光波导

COMMAD 2012 Pub Date : 2012-12-01 DOI:10.1109/COMMAD.2012.6472338

T. Crasto, H. Steigerwald, V. Sivan, A. Mitchell

{"title":"在Ti扩散过程中蚀刻实现了z-cut、5mol % mg掺杂、全等LiNbO3的光波导","authors":"T. Crasto, H. Steigerwald, V. Sivan, A. Mitchell","doi":"10.1109/COMMAD.2012.6472338","DOIUrl":null,"url":null,"abstract":"We report the fabrication of optical waveguides in z-cut 5 mol% Mg-doped congruent LiNbO3 using the etching during indiffusion of Ti (EDIT) technique. Waveguiding is demonstrated at 633 nm and 1550 nm and effective index and loss measurements of waveguide at 1550 nm are also presented.","PeriodicalId":136573,"journal":{"name":"COMMAD 2012","volume":"473 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Optical waveguides realised in z-cut, 5 mol% Mg-doped, congruent LiNbO3 using Etching During Indiffusion of Ti\",\"authors\":\"T. Crasto, H. Steigerwald, V. Sivan, A. Mitchell\",\"doi\":\"10.1109/COMMAD.2012.6472338\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report the fabrication of optical waveguides in z-cut 5 mol% Mg-doped congruent LiNbO3 using the etching during indiffusion of Ti (EDIT) technique. Waveguiding is demonstrated at 633 nm and 1550 nm and effective index and loss measurements of waveguide at 1550 nm are also presented.\",\"PeriodicalId\":136573,\"journal\":{\"name\":\"COMMAD 2012\",\"volume\":\"473 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"COMMAD 2012\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/COMMAD.2012.6472338\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"COMMAD 2012","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMMAD.2012.6472338","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

本文报道了利用Ti (EDIT)扩散过程刻蚀技术在掺杂5mol % mg的同型LiNbO3中制备光波导。对633 nm和1550 nm波长的波导进行了演示，并给出了1550 nm波长下波导的有效折射率和损耗测量。

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Optical waveguides realised in z-cut, 5 mol% Mg-doped, congruent LiNbO3 using Etching During Indiffusion of Ti

We report the fabrication of optical waveguides in z-cut 5 mol% Mg-doped congruent LiNbO3 using the etching during indiffusion of Ti (EDIT) technique. Waveguiding is demonstrated at 633 nm and 1550 nm and effective index and loss measurements of waveguide at 1550 nm are also presented.

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COMMAD 2012

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