碳纳米管电流诱导的大磁场——碳纳米管电感器的设计

K. Tsubaki, H. Shioya, J. Ono, Y. Nakajima, T. Hanajiri, H. Yamaguchi
{"title":"碳纳米管电流诱导的大磁场——碳纳米管电感器的设计","authors":"K. Tsubaki, H. Shioya, J. Ono, Y. Nakajima, T. Hanajiri, H. Yamaguchi","doi":"10.1109/DRC.2005.1553084","DOIUrl":null,"url":null,"abstract":"New concepts of electronic components are needed to fabricate further high-performance integrated circuit. One of the new concepts is the incorporation of inductors into integrated circuits. The incorporation into integrated circuits, however, has the difficulty in three dimensional nano-fabrication technique, and the small effect due to the small quantity of magnetic permeability of o = 4 it x10-7 H/m and the large diameter of the inductor's wires. We have proposed the inductors made of carbon nanotube [1, 2]. Ihough the fabrication of the proposed inductor is still challenging and has many problems, merits of the proposed inductor are following, 1. Since the radius (r) of carbon nanotube are several nm, the magnetic field (H) induced by the current (1) in carbon nanotube is about one thousand times larger than that induced by the current in normal copper wire whose radius is about several gm. (H = I/2;zr) 2. According to the relation between magnetic field (I) in the inductor and inductance (L) of the inductor, 1/2 JPOH2dV = 1/2LI2, the large magnetic field (A) results in the large inductance (L). 3. Since the carbon nanotube can be bent with small curvature, the inductor made of carbon nanotube is smaller than the inductor made of copper or gold. In this paper, we have observed the large magnetic field induced by the small current in carbon nanotube using magnetic force microscope [31. The used carbon nanotube was made by laser ablation method. After the dispersing the carbon nanotube on the SiO 2/Si substrate, gold/nickel metal interconnects to the carbon nanotube. By applying the alternating current in carbon nanotube, we have obtained the images of synchronized component in the force signal using lock' in measurement. Since the images were the convolution of Kelvin force microscopy and magnetic force microscopy images, we extracted the magnetic field distribution using the symmetry difference between the magnetic and electric field. Observed magnetic fields were proportional to the amplitude of the alternating current. The estimated magnetic field near the carbon nanotube of 8 mT at 250 pA roughly agrees with the theoretical one. This magnetic field is also very large compared with that produced by the copper wire in the normal inductor. Since the inductance of 1.0 ,um long carbon nanotube is estimated to be about 1 pH, normalized inductance is found to be larger than that of normal inductance [21. Therefore, carbon nanotube inductors are promising passive electric component for the integrated circuit Reference [1]Y. Sakurada, S. Irako, Y. Nakajima, T. Hanajiri, K. Tsubaki, Ext. Abstr. (51st Spring meet 2004); Japan Society of Applied Physics and Related Societies, 29p-F-16. 121S. Irako, Y. Sakurada, Y. Nakajima, T. Hanajiri, T. Toyabe, K. Tsubaki, Ext. Abstr. (51st Spring meet. 2004); Japan Society of Applied Physics and Related Societies, 29p-F-15. 13]D. Saida and T. Takahashi, Jpn. J. Appl. Phys. Vol. 42, pp.4874, 2003.","PeriodicalId":306160,"journal":{"name":"63rd Device Research Conference Digest, 2005. DRC '05.","volume":"82 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Large magnetic field induced by carbon nanotube current -proposal of carbon nanotube inductors\",\"authors\":\"K. Tsubaki, H. Shioya, J. Ono, Y. Nakajima, T. Hanajiri, H. Yamaguchi\",\"doi\":\"10.1109/DRC.2005.1553084\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"New concepts of electronic components are needed to fabricate further high-performance integrated circuit. One of the new concepts is the incorporation of inductors into integrated circuits. The incorporation into integrated circuits, however, has the difficulty in three dimensional nano-fabrication technique, and the small effect due to the small quantity of magnetic permeability of o = 4 it x10-7 H/m and the large diameter of the inductor's wires. We have proposed the inductors made of carbon nanotube [1, 2]. Ihough the fabrication of the proposed inductor is still challenging and has many problems, merits of the proposed inductor are following, 1. Since the radius (r) of carbon nanotube are several nm, the magnetic field (H) induced by the current (1) in carbon nanotube is about one thousand times larger than that induced by the current in normal copper wire whose radius is about several gm. (H = I/2;zr) 2. According to the relation between magnetic field (I) in the inductor and inductance (L) of the inductor, 1/2 JPOH2dV = 1/2LI2, the large magnetic field (A) results in the large inductance (L). 3. Since the carbon nanotube can be bent with small curvature, the inductor made of carbon nanotube is smaller than the inductor made of copper or gold. In this paper, we have observed the large magnetic field induced by the small current in carbon nanotube using magnetic force microscope [31. The used carbon nanotube was made by laser ablation method. After the dispersing the carbon nanotube on the SiO 2/Si substrate, gold/nickel metal interconnects to the carbon nanotube. By applying the alternating current in carbon nanotube, we have obtained the images of synchronized component in the force signal using lock' in measurement. Since the images were the convolution of Kelvin force microscopy and magnetic force microscopy images, we extracted the magnetic field distribution using the symmetry difference between the magnetic and electric field. Observed magnetic fields were proportional to the amplitude of the alternating current. The estimated magnetic field near the carbon nanotube of 8 mT at 250 pA roughly agrees with the theoretical one. This magnetic field is also very large compared with that produced by the copper wire in the normal inductor. Since the inductance of 1.0 ,um long carbon nanotube is estimated to be about 1 pH, normalized inductance is found to be larger than that of normal inductance [21. Therefore, carbon nanotube inductors are promising passive electric component for the integrated circuit Reference [1]Y. Sakurada, S. Irako, Y. Nakajima, T. Hanajiri, K. Tsubaki, Ext. Abstr. (51st Spring meet 2004); Japan Society of Applied Physics and Related Societies, 29p-F-16. 121S. Irako, Y. Sakurada, Y. Nakajima, T. Hanajiri, T. Toyabe, K. Tsubaki, Ext. Abstr. (51st Spring meet. 2004); Japan Society of Applied Physics and Related Societies, 29p-F-15. 13]D. Saida and T. Takahashi, Jpn. J. Appl. Phys. Vol. 42, pp.4874, 2003.\",\"PeriodicalId\":306160,\"journal\":{\"name\":\"63rd Device Research Conference Digest, 2005. DRC '05.\",\"volume\":\"82 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-06-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"63rd Device Research Conference Digest, 2005. DRC '05.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DRC.2005.1553084\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"63rd Device Research Conference Digest, 2005. DRC '05.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DRC.2005.1553084","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3

摘要

为了进一步制造高性能集成电路,需要新的电子元件概念。新概念之一是将电感器集成到集成电路中。然而,将其纳入集成电路存在三维纳米制造技术上的困难,并且由于电感器导线直径大,导磁率为0 = 4 × 10-7 H/m的量小,影响较小。我们提出了用碳纳米管制作的电感器[1,2]。虽然所提出的电感器的制作仍然具有挑战性和许多问题,但所提出的电感器的优点如下:1。由于碳纳米管的半径r为几nm,因此电流(1)在碳纳米管中产生的磁场(H)比半径约为几gm的普通铜线中产生的磁场(H = I/2;zr) 2大1000倍左右。根据电感的磁场(I)与电感的电感量(L)的关系,1/2 JPOH2dV = 1/2LI2,磁场(A)越大,电感量(L)越大。由于碳纳米管可以弯曲成较小的曲率,因此碳纳米管制成的电感比铜或金制成的电感要小。在本文中,我们利用磁力显微镜观察到了碳纳米管中小电流所产生的大磁场[31]。采用激光烧蚀法制备了碳纳米管。将碳纳米管分散在sio2 /Si衬底上后,金/镍金属与碳纳米管互连。通过在碳纳米管中施加交流电流,我们通过锁相测量获得了力信号中同步分量的图像。由于图像是开尔文力显微镜和磁力显微镜图像的卷积,我们利用磁场和电场的对称差提取磁场分布。观察到的磁场与交流电的振幅成正比。在250 pA条件下,碳纳米管附近的磁场估计值与理论值基本一致。与普通电感器中的铜线产生的磁场相比,这个磁场也非常大。由于估计1.0 μ m长碳纳米管的电感约为1 pH,因此发现归一化电感大于正常电感[21]。因此,碳纳米管电感器是集成电路中很有前途的无源电子元件。樱田,中岛,花尻,Tsubaki, Ext.摘要(2004年第51届春季运动会);日本应用物理学会及相关学会,29p-F-16。121年代。伊拉子,樱田,中岛,花尻,Toyabe, Tsubaki, Ext.摘要第51届春季会议。2004);日本应用物理学会及相关学会,29p-F-15。13] D。Saida和T. Takahashi,日本。j:。理论物理。第42卷,第4874页,2003。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Large magnetic field induced by carbon nanotube current -proposal of carbon nanotube inductors
New concepts of electronic components are needed to fabricate further high-performance integrated circuit. One of the new concepts is the incorporation of inductors into integrated circuits. The incorporation into integrated circuits, however, has the difficulty in three dimensional nano-fabrication technique, and the small effect due to the small quantity of magnetic permeability of o = 4 it x10-7 H/m and the large diameter of the inductor's wires. We have proposed the inductors made of carbon nanotube [1, 2]. Ihough the fabrication of the proposed inductor is still challenging and has many problems, merits of the proposed inductor are following, 1. Since the radius (r) of carbon nanotube are several nm, the magnetic field (H) induced by the current (1) in carbon nanotube is about one thousand times larger than that induced by the current in normal copper wire whose radius is about several gm. (H = I/2;zr) 2. According to the relation between magnetic field (I) in the inductor and inductance (L) of the inductor, 1/2 JPOH2dV = 1/2LI2, the large magnetic field (A) results in the large inductance (L). 3. Since the carbon nanotube can be bent with small curvature, the inductor made of carbon nanotube is smaller than the inductor made of copper or gold. In this paper, we have observed the large magnetic field induced by the small current in carbon nanotube using magnetic force microscope [31. The used carbon nanotube was made by laser ablation method. After the dispersing the carbon nanotube on the SiO 2/Si substrate, gold/nickel metal interconnects to the carbon nanotube. By applying the alternating current in carbon nanotube, we have obtained the images of synchronized component in the force signal using lock' in measurement. Since the images were the convolution of Kelvin force microscopy and magnetic force microscopy images, we extracted the magnetic field distribution using the symmetry difference between the magnetic and electric field. Observed magnetic fields were proportional to the amplitude of the alternating current. The estimated magnetic field near the carbon nanotube of 8 mT at 250 pA roughly agrees with the theoretical one. This magnetic field is also very large compared with that produced by the copper wire in the normal inductor. Since the inductance of 1.0 ,um long carbon nanotube is estimated to be about 1 pH, normalized inductance is found to be larger than that of normal inductance [21. Therefore, carbon nanotube inductors are promising passive electric component for the integrated circuit Reference [1]Y. Sakurada, S. Irako, Y. Nakajima, T. Hanajiri, K. Tsubaki, Ext. Abstr. (51st Spring meet 2004); Japan Society of Applied Physics and Related Societies, 29p-F-16. 121S. Irako, Y. Sakurada, Y. Nakajima, T. Hanajiri, T. Toyabe, K. Tsubaki, Ext. Abstr. (51st Spring meet. 2004); Japan Society of Applied Physics and Related Societies, 29p-F-15. 13]D. Saida and T. Takahashi, Jpn. J. Appl. Phys. Vol. 42, pp.4874, 2003.
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