评估柔性衬底上石墨烯场效应晶体管的Al2O3介电体的测试结构

2018 IEEE International Conference on Microelectronic Test Structures (ICMTS) Pub Date : 2018-03-01 DOI:10.1109/ICMTS.2018.8383768

Xinxin Yang, M. Bonmann, A. Vorobiev, K. Jeppson, J. Stake

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引用次数: 0

摘要

我们开发了一种测试结构，用于评估石墨烯上生长的Al2O3栅极介电体的质量，用于柔性衬底上的石墨烯场效应晶体管。测试结构由PET衬底上的金属/电介质/石墨烯堆叠组成，只需要一个光刻步骤就可以对上层金属电极进行图案化。给出了泄漏电流、电容和损耗正切的测量结果。

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Test structures for evaluating Al2O3 dielectrics for graphene field effect transistors on flexible substrates

We have developed a test structure for evaluating the quality of Al2O3 gate dielectrics grown on graphene for graphene field effect transistors on flexible substrates. The test structure consists of a metal/dielectric/ graphene stack on a PET substrate and requires only one lithography step for the patterning of the topside metal electrodes. Results from measurements of leakage current, capacitance and loss tangent are presented.

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2018 IEEE International Conference on Microelectronic Test Structures (ICMTS)

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