{"title":"用纳米压印光刻技术制备曲面抗反射蛾眼结构","authors":"M. Haslinger, A. Moharana, M. Mühlberger","doi":"10.1117/12.2535683","DOIUrl":null,"url":null,"abstract":"In this work, we describe an effective and simple method for surface patterning of 3D objects with antireflective moth-eye structures via UV based nanoimprint lithography using soft stamps. So-called anti-reflective moth-eye structures are subwavelength nanostructures that can reduce the reflection of surfaces over the entire visible spectrum of light. Such broadband antireflective coatings are especially interesting for optical elements like lenses.","PeriodicalId":287066,"journal":{"name":"European Mask and Lithography Conference","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Antireflective moth-eye structures on curved surfaces fabricated by nanoimprint lithography\",\"authors\":\"M. Haslinger, A. Moharana, M. Mühlberger\",\"doi\":\"10.1117/12.2535683\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, we describe an effective and simple method for surface patterning of 3D objects with antireflective moth-eye structures via UV based nanoimprint lithography using soft stamps. So-called anti-reflective moth-eye structures are subwavelength nanostructures that can reduce the reflection of surfaces over the entire visible spectrum of light. Such broadband antireflective coatings are especially interesting for optical elements like lenses.\",\"PeriodicalId\":287066,\"journal\":{\"name\":\"European Mask and Lithography Conference\",\"volume\":\"6 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-08-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"European Mask and Lithography Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2535683\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"European Mask and Lithography Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2535683","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Antireflective moth-eye structures on curved surfaces fabricated by nanoimprint lithography
In this work, we describe an effective and simple method for surface patterning of 3D objects with antireflective moth-eye structures via UV based nanoimprint lithography using soft stamps. So-called anti-reflective moth-eye structures are subwavelength nanostructures that can reduce the reflection of surfaces over the entire visible spectrum of light. Such broadband antireflective coatings are especially interesting for optical elements like lenses.
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