Haslinawati Mohd Mustapha, M. A. Mohamed, A. A. Hamzah, B. Majlis
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引用次数: 2
摘要
薄膜力学和振动响应的分析在传感器的建模和制作中起着决定性的作用。本文提出了石墨烯作为膜材料，并给出了一些数学公式来评估模型。在Comsol Multiphysics version 5.1中建立了NEMS电容式纳米听筒石墨烯膜的结构模型。膜被设计成圆形，可选择直径和厚度。详细讨论了不同膜厚条件下的对比研究。0.3 nm的石墨烯膜挠度最大，为90.0 μm，而1.0 nm和3.0 nm的石墨烯膜挠度较小，分别为14.0 μm和0.5 μm。观察了挠度和固有频率随振型的变化曲线。结果表明，无论石墨烯膜厚度的大小，挠度与施加压力之间都呈线性关系。
Design analysis of graphene membrane mechanics and vibration response
The analysis of membrane mechanics and vibration response are decisive especially in modeling and fabrication of sensor. This paper presents a graphene as a membrane material with some mathematical formula that used in evaluate the model. A structural model of graphene membrane for NEMS capacitive nanophone was built in Comsol Multiphysics version 5.1. The membrane is designed as in circular shape with selective diameter and thickness. A comparative study with different membrane thickness is discussed thoroughly. The 0.3 nm graphene membrane shows the highest deflection as 90.0 μm while the thicker graphene membrane, 1.0 nm and 3.0 nm gives the less deflection which is 14.0 μm and 0.5 μm respectively. The graph of deflection and the natural frequency with the mode shapes are observed. It shows a linear relation between the deflection and applied pressure regardless the value of the thickness of graphene membrane.
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