Pragmatics of capacitive micromachined ultrasonic transducer

With the development in silicon micromachining technology over two decades the Capacitive Micromachined Ultrasonic Transducers (CMUTs) have been found to be a good substitute for piezoelectric transducers. CMUTs have the advantage of being fully compatible when integrated with the on chip electronics resulting in the production of acutely low cost and high performance devices with both 1D and 2D arrays. The CMUTs can be fabricated with various geometries like circular, square, rectangular and hexagon. The geometry plays a significant role in the development of the ultrasonic transducers. The importance of CMUT is being discussed in this paper including the pull in voltage, C-V characteristics, resonantfrequency and the deflection profiles of the designed CMUT. Time dependent analysis, stationary analysis and the Eigen frequency have been done in COMSOL. Finite element modelling is realized with 3D model of CMUT. CMUTs finds application in medical imaging, nondestructive testing, distance measuring etc.