气源分子束外延生长GaAsSb/GaAs多量子阱中热力学模型与前驱体态的结合

J. Lin, L. Chou, Hao-Hsiung Lin
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引用次数: 0

摘要

两个V族原子之间的竞争行为在III-V-V化合物的外延生长中是显著的。为了描述气源分子束外延(GSMBE)在GaAs(100)衬底上GaAsSb/GaAs多量子阱(mqw)的赝晶生长过程中Sb和As原子之间的竞争行为,我们建立了前驱体态和相关热力学模型的组合。由于生长薄膜和衬底之间的晶格不匹配而引起的应变诱导掺入系数也被考虑在内。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The combination for thermodynamic model and precursor state used in GaAsSb/GaAs multiple quantum wells grown by gas source molecular beam epitaxy
The competition behavior between two Group V atoms is significant in the epitaxy growth of III-V-V compounds. We have developed a combination for the precursor state and the associated thermodynamic model in order to describe the competition behavior between Sb and As atoms during the pseudomorphic growth of GaAsSb/GaAs multiple quantum wells (MQWs) on GaAs (100) substrates by gas-source molecular-beam epitaxy (GSMBE). The strain-induced incorporation coefficient due to lattice mismatch between the growing film and substrate is also taken into account.
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