走向便携式热真空传感器——对电气构件和紧凑型外壳的考虑

D. Randjelović, P. Poljak, M. Sarajlić, M. Vorkapić, M. Frantlović, D. Tanasković, B. Popović
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引用次数: 0

摘要

基于ICTM热电堆的多用途MEMS传感器已成功演示为气体流量传感器、真空传感器、热转换器和气体型传感器。除了进一步改进传感器的设计和性能外,研究方向之一是实现便携式热器件。本文的目的是提出实现便携式热真空装置所需的电气构建块和紧凑外壳的初步考虑。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Towards Portable Thermal Vacuum Sensor-Consideration of Electrical Building Blocks and Compact Housing
Multipurpose ICTM thermopile-based MEMS sensors have been successfully demonstrated as gas flow sensor, vacuum sensor, thermal converter and gas type sensor. Apart from further improvement of the sensor's design and performances, one direction of research is working towards realization of portable thermal devices. The aim of this paper is to present preliminary considerations of electrical building blocks and compact housing neccessary to realize a portable thermal vacuum device.
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