先进MEMS加速度计的市场机会,以及实际能力与所需规格的概述

Stauffer Jean-Michel
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引用次数: 32

摘要

全球加速度计业务分为两个不同的市场:一方面是“运动监测和事件检测”领域,主要由汽车业务和低成本消费者业务驱动;另一方面是“测量和控制”领域,主要由航空航天和惯性导航业务驱动,历史上主要由传统的相对高成本的微机械产品服务。MEMS产品在汽车领域取得商业突破用了近20年的时间。如今,凭借成熟的技术和低成本的大批量生产,MEMS加速度传感器处于最佳位置,可以成功进入传统的惯性应用,也可以呈现可能的新兴应用。将详细讨论构成全球市场的各个领域,并分析惯性传感、倾斜传感和振动传感所需的规格。如今,高性能MEMS电容式加速度计提供了所需的长期稳定性和振动纠偏误差特性,可用于航空和国防应用的惯性制导和导航。此外,这些产品提供了先进的功能,并且在恶劣的环境中表现非常好,规格不会下降,例如振幅高于20,000 g的枪硬冲击。我们建议分享鉴定结果并评论现有的实际性能。最后,将提出未来的需求,并更详细地讨论实际或未来的解决方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Market opportunities for advanced MEMS accelerometers and overview of actual capabilities vs. required specifications
The worldwide accelerometer business is split in two distinctive markets: The "movement monitoring and event detection" world in one hand, largely driven by the automotive business and low cost consumer business and the "measurement and control" world in the other hand, mainly driven by the aerospace and inertial navigation business and historically served principally by conventional relative high cost micro mechanical products. It took nearly 20 years until MEMS products achieved a commercial breakthrough in the automotive. Today, with a mature technology and high-volume production at low cost, MEMS acceleration sensors are in the best position to successfully move into traditional inertial applications and also to render possible newly emerging applications. The various domains constituting the worldwide market will be discussed in detail and required specifications for inertial sensing, tilt sensing and vibration sensing will be analyzed. Today, high performances MEMS capacitive accelerometers, offering the required long-term stability and vibration rectification error characteristics are produced to serve inertial guidance and navigation for aeronautic and defence applications. Furthermore, these products are offering advanced functionalities and are performing extremely well without degradation of specifications in rugged environments such as gun hard shocks with amplitudes higher than 20'000g. We propose to share qualification results and comment the actual performances available. Finally, future requirements will be presented and actual or future solutions will be discussed in more details.
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