S矩阵与ABCD链矩阵公式在探针尖端校准中的比较

J. Grzyb, G. Troster
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引用次数: 1

摘要

通过与s矩阵公式的比较,给出了链ABCD矩阵公式在用探针标定提取特征阻抗方面的一些优势。该程序基于两种不同晶圆线上标准的已知测量技术[1]。假设使用标准校准基板进行初始的晶圆外LRM或TRL校准。第一个特征是用ABCD链矩阵来表示整个提取问题。它允许我们忽略一个真正的行波基于Smatrix[3]的不对称性的限制在两个不同的波导之间的一般互反跃迁,特别是探针-尖端-线结。这种限制是两个波导的复杂特性阻抗之间的差异。相反,其导纳矩阵的对称性或其链矩阵的行列式AD-BC不受这种效应的影响。如果只使用并联导纳或并联导纳的级联和串联阻抗来模拟探针-端-线过渡,则链矩阵的a元素不受这些寄生的影响而等于1。这允许即时特征阻抗提取,而无需分析任何这些过渡模型。此外,还可以选择有效的模型,并验证是否有任何可能的等效寄生元件可以忽略。下一个特征是,以特定方式修改的链矩阵公式允许提取探针尖端处参考平面的等效位置。等效是指在串联寄生阻抗(通常是寄生电感)的影响可以忽略的情况下,它们的位置等于它们的物理位置。这是一个非常有趣的性质,如果我们考虑到探针尖端和参考平面的确切位置是未知的。最后一个特征允许我们在假设其链ABCD矩阵的条件A=D(互反结构的模型是对称的)近似具有良好精度的情况下,无需对过渡结构建模即可提取线路的特征阻抗。这样的公式会自动考虑到过渡的分布式性质,这在毫米波频率上是很重要的。从各频率点的解析方程中提取模型的所有等效单元值。从而可以研究它们的频率特性,并证明模型(常等效单元值)的有效性。随着平面传输线的使用越来越多,支持有损混合模式的波导之间的结已经变得很常见。在这种情况下,经典的微波电路理论失效了。经典的波导理论无法做到这一点
本文章由计算机程序翻译,如有差异,请以英文原文为准。
S Matrix versus ABCD Chain Matrix Formulation in Probe-tip Calibrations
We present some advantageous features of the chain ABCD matrix formulation in comparison with S-matrix formulation in characteristic impedance extraction with probetip calibrations. The procedure is based on the known measurement technique of two different on-wafer line standards [1]. An initial off-wafer LRM or TRL calibration with standard calibration substrate is assumed. The first feature is the formulation of the whole extraction problem in terms of the ABCD chain matrix. It allows us to omit one of the limitations of the true traveling waves based Smatrix [3] asymmetry of a general reciprocal transition between two different waveguides, in particular probe-tip-line junction. This limitation is a difference between complex characteristic impedances of both waveguides. On the contrary, the symmetry of its admittance matrix or equivalently the determinant AD-BC of its chain matrix is not influenced by this effect. If one models the probe-tip-line transition by use of only a shunt admittance or cascade of a shunt admittance and a series impedance, the A element of chain matrix is not influenced by these parasitics and is equal to one. This allows immediate characteristic impedance extraction without analyzing any of these transition models. Moreover, one is able to choose the valid model and verify if any of the possible equivalent parasitic elements can be neglected. The next feature is that the chain matrix formulation modified in a specific way allows the extraction of the equivalent position of the reference planes at the probe-tips. Equivalent means that their locations are equal to their physical locations in case of negligible influence of the series parasitic impedance (usually parasitic inductance). This is very interesting property if we take into consideration that the exact position of the probe tips and reference planes are not known. The last feature allows us to extract the characteristic impedance of the lines without modeling the transition structure under assumption that the condition A=D of its chain ABCD matrix (the model of a reciprocal structure is symmetric) is approximated with good accuracy. Such a formulation takes automatically into consideration even a distributed nature of the transition, which can be of importance at mm-wave frequencies. All the equivalent elements values of the models are extracted from analytical equations for every frequency point. Thus their frequency behavior can be investigated and possible validity of the model (constant equivalent element values) proved. I General Waveguide Theory With the increasing use of planar transmission lines, junctions between waveguides supporting lossy hybrid modes have become common. In this case the classical microwave circuit theories fail. The classical waveguide theory fails to
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