用于SnO2气体传感器物联网应用的高可靠性500µW电阻-数字接口电路

Jianguo Yang, Xiaowen Li, Qingting Ding, X. Xue, Xiaoxin Xu, Q. Luo, H. Lv, Ming Liu
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引用次数: 1

摘要

提出了一种基于低功耗可重构环振(RO)的SnO2气体传感器接口电路。RO周期主要由气体传感器的采样电压决定,而采样电压又依赖于气体浓度。该电路提高了电阻式传感器的性能和功率效率。接口电路采用0.18µm的逻辑工艺,面积为4000µm2,功耗为0.5 mW。将SnO2薄膜沉积在MEMS工艺加工的微热板上,最终以多芯片封装的形式与接口芯片集成。亚ppm级乙醇气体的检测已被证明,传感器的总功耗小于25 mW,适用于物联网气体检测应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A High Reliability 500 µW Resistance-to-Digital Interface Circuit for SnO2 Gas Sensor IoT Applications
A low power re-configurable ring oscillator (RO) based interface circuit for SnO2 gas sensor is presented. The period of RO is dominated by the sampling voltage from gas sensor which is dependent on gas concentration. This proposed circuit improves the performance and power efficiency for resistive sensors. The interface circuit is implemented in 0.18 µm logic process with an area of 4000 µm2and 0.5 mW power consumption. The SnO2 thin films deposited on a micro hotplate machined by a MEMS process and is finally integrated with the interface chip in the form of a multi-chip package. Detection of Sub-ppm-Level ethanol gas has been demonstrated, the total power consumption of the sensor is less than 25 mW, which is suitable for IoT gas detection applications.
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