利用自然散斑估计EUV显微镜的离轴像差

Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen Pub Date : 2016-07-25 DOI:10.1364/ISA.2016.ITH1F.2

A. Shanker, A. Wojdyla, G. Gunjala, Jonathan Dong, M. Benk, A. Neureuther, K. Goldberg, L. Waller

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引用次数: 2

摘要

在极紫外(EUV)显微镜下，在足够相干的条件下，平面物体表面的粗糙度会产生自然斑点。利用相位到强度的传递函数理论，从散斑强度的光谱直接估计像差证明了不同的照明角度。

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Off-axis Aberration Estimation in an EUV Microscope Using Natural Speckle

Surface roughness on a flat object causes natural speckle when imaged by an extreme ultraviolet (EUV) microscope under sufficient coherence. Using a phase-to-intensity transfer function theory, direct estimation of aberrations from the spectrum of the speckle intensity is demonstrated for various illumination angles.

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Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen

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