一种具有双径向磁场的电磁双轴微型扫描仪

2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI:10.1109/OMN.2017.8051501

Yangkyu Park, Seunghwan Moon, Jaekwon Lee, Kwanghyun Kim, Sang-Jin Lee, Jong-Hyun Lee

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引用次数: 0

摘要

研制了一种具有双径向磁场的电磁扫描器，可在水平和垂直扫描中增大扭矩。单电流路径水平扫描角度为50.55°，垂直扫描角度为9.06°。

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An electromagnetic two-axis micro scanner with dual radial magnetic fields

An electromagnetic scanner with dual radial magnetic fields was developed to enlarge torque in both horizontal and vertical scans. Scan angles were 50.55° and 9.06° for horizontal and vertical scans, respectively, for single current path.

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2017 International Conference on Optical MEMS and Nanophotonics (OMN)

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