微机械嵌入式测试结构表征方法的发展

Digest of Papers. 2004 Topical Meeting onSilicon Monolithic Integrated Circuits in RF Systems, 2004. Pub Date : 2004-09-08 DOI:10.1109/SMIC.2004.1398234

E. Davies-venn, T. Pan, Antonio Baldi, Rhonda F. Drayton, Babak Ziaie

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引用次数: 0

摘要

提出了表征硅衬底上低频嵌套无源的方法。讨论了高电阻率和低电阻率硅片上嵌入线圈Q因子提取的周期夹具和片上方法。讨论了馈线设计，并给出了基于CPW的设计体系结构的性能限制数据。基于s参数测量的15转配置，成功提取了1 GHz以下工作的嵌入式电感的质量(Q)因子> 50。最后，基于片上测量，给出了电感器的Q因子性能。

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Development of characterization methods for micromachined embedded test structures

Methods of characterizing low frequency embedded passives on silicon substrates are suggested. Durioid fixtures and on-wafer methods are discussed for extracting Q factor of embedded coils on high and low resistivity silicon. Feedline designs are discuss and data is presented regarding the performance limitation of CPW based design architectures. A quality (Q) factor of an embedded inductor > 50 is successfully extracted for operation below 1 GHz based on a 15 turn configuration using S-parameter measurements. Finally inductor performance in terms of Q factor is presented based on on-wafer measurements.

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Digest of Papers. 2004 Topical Meeting onSilicon Monolithic Integrated Circuits in RF Systems, 2004.

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