氮化铝纳米锥的合成及其电子发射性能

C. Liu, Q. Wu, X.Z. Wang, Z. Hu, Y. Chen, S. Deng, N. Xu
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摘要

只提供摘要形式。氮化铝纳米线由于负电子亲和和一维几何结构的结合,表现出优异的场发射性能。本文报道了硅片上准对准氮化铝纳米锥的制备及其场发射性能。这些纳米锥体是由AlCl/sub - 3/蒸气与NH/sub - 3//N/sub - 2/气体在700 ~ 800/spl℃的温度下在镍催化剂下反应形成的。随后的x射线衍射、扫描电镜和透射电镜分析表明,这些锥体具有纤锌矿相,并且随着直径的线性减小,优先沿c轴生长。这些锥体尖端的直径测量在20到50纳米之间。在环境温度下,在压力为1 /spl倍/ 10/sup -7/ Torr的真空室内进行场发射测量。从特征电流-电压曲线可以看出,其导通电压约为12V//spl mu/m,与GaN纳米线相当。基于两段坡度的Fowler-Nordheim样地,计算得到的场增强因子分别约为400和1200。这些结果表明,这些氮化铝纳米锥阵列在电子发射器件领域具有广阔的应用前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Synthesis and electron emission properties of aluminum nitride nano-cones
Summary form only given. Aluminum nitride nanowires have displayed superior field emission due to the combination of negative electron affinity and one-dimensional geometry. Here, we report on the preparation and field emission properties of quasi-aligned aluminum nitride nano-cones on the silicon wafer. These nano-cones are formed via the reaction between AlCl/sub 3/ vapor and NH/sub 3//N/sub 2/ gas at the temperature ranging from 700/spl deg/C to 800/spl deg/C under nickel catalyst. The subsequent analyses including X-ray diffraction, scanning electron microscopy and transmission electron microscopy indicate that these cones have wurtzite phase and grow preferentially along c-axis with the linear decreasing diameter. The diameters of the tips of these cones are measured to be between 20 and 50nm. Field emission measurements were carried out in the vacuum chamber at the pressure of 1 /spl times/ 10/sup -7/ Torr at the ambient temperature. From the characteristic current-voltage curves, it is revealed that the turn-on voltage is about 12V//spl mu/m comparable with that of GaN nanowires. Based on the Fowler-Nordheim plot with two-stage slope, the field enhancement factors are calculated to be about 400 and 1200 respectively. These results indicate that these AlN nano-cone arrays may have promising application in field of electron emission emitters.
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