{"title":"用于后端良率改进的基础设施IP","authors":"L. Forli, J. Portal, D. Née, B. Borot","doi":"10.1109/TEST.2003.1271101","DOIUrl":null,"url":null,"abstract":"The objective of this paper is to present an infrastructure IP (I-IP) designed to characterize yield loss in the process back-end. The I-IP structure is described in using a bottom-up approach with emphasis on its scalability. Using this infrastructure IP, the defect density tracking as well as the test and diagnosis of process back-end critical parameters can be quickly and easily performed. To reach this goal, the test flow and its related signature extraction is given. Thus, the use of this I-IP allows to improve the manufacturing process by diagnosing the back-end yield loss.","PeriodicalId":236182,"journal":{"name":"International Test Conference, 2003. Proceedings. ITC 2003.","volume":"48 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Infrastructure IP for back-end yield improvement\",\"authors\":\"L. Forli, J. Portal, D. Née, B. Borot\",\"doi\":\"10.1109/TEST.2003.1271101\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The objective of this paper is to present an infrastructure IP (I-IP) designed to characterize yield loss in the process back-end. The I-IP structure is described in using a bottom-up approach with emphasis on its scalability. Using this infrastructure IP, the defect density tracking as well as the test and diagnosis of process back-end critical parameters can be quickly and easily performed. To reach this goal, the test flow and its related signature extraction is given. Thus, the use of this I-IP allows to improve the manufacturing process by diagnosing the back-end yield loss.\",\"PeriodicalId\":236182,\"journal\":{\"name\":\"International Test Conference, 2003. Proceedings. ITC 2003.\",\"volume\":\"48 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-09-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Test Conference, 2003. Proceedings. ITC 2003.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/TEST.2003.1271101\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Test Conference, 2003. Proceedings. ITC 2003.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TEST.2003.1271101","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The objective of this paper is to present an infrastructure IP (I-IP) designed to characterize yield loss in the process back-end. The I-IP structure is described in using a bottom-up approach with emphasis on its scalability. Using this infrastructure IP, the defect density tracking as well as the test and diagnosis of process back-end critical parameters can be quickly and easily performed. To reach this goal, the test flow and its related signature extraction is given. Thus, the use of this I-IP allows to improve the manufacturing process by diagnosing the back-end yield loss.
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