M. Salvi, J. Viallet, H. L'haridon, P. Favennec, M. Gauneau
{"title":"Mg和Ti共注入制备半绝缘Inp","authors":"M. Salvi, J. Viallet, H. L'haridon, P. Favennec, M. Gauneau","doi":"10.1109/SIM.1992.752678","DOIUrl":null,"url":null,"abstract":"Implantation of magnesium acceptor in semi-insulating InP:Fe leads to a p-type layer which is further implanted with the low diffusitivity titanium deep donor, the sample recovering the semi-insulating behavior.","PeriodicalId":368607,"journal":{"name":"Proceedings of the 7th Conference on Semi-insulating III-V Materials,","volume":"71 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1992-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Semi-Insulating Inp Obtained by Co-Implantation of Mg and Ti\",\"authors\":\"M. Salvi, J. Viallet, H. L'haridon, P. Favennec, M. Gauneau\",\"doi\":\"10.1109/SIM.1992.752678\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Implantation of magnesium acceptor in semi-insulating InP:Fe leads to a p-type layer which is further implanted with the low diffusitivity titanium deep donor, the sample recovering the semi-insulating behavior.\",\"PeriodicalId\":368607,\"journal\":{\"name\":\"Proceedings of the 7th Conference on Semi-insulating III-V Materials,\",\"volume\":\"71 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1992-04-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 7th Conference on Semi-insulating III-V Materials,\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SIM.1992.752678\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 7th Conference on Semi-insulating III-V Materials,","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SIM.1992.752678","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Semi-Insulating Inp Obtained by Co-Implantation of Mg and Ti
Implantation of magnesium acceptor in semi-insulating InP:Fe leads to a p-type layer which is further implanted with the low diffusitivity titanium deep donor, the sample recovering the semi-insulating behavior.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
