静电放电保护器件鲁棒性的几何分析

2008 International Conference on Advanced Semiconductor Devices and Microsystems Pub Date : 2008-10-01 DOI:10.1109/ASDAM.2008.4743301

A. Chvála, D. Donoval, P. Beno, J. Marek, T. Kosik

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引用次数: 0

摘要

对先进的二维和三维混合模式电热器件所支持的ESD保护器件进行了分析和电路仿真。研究了结构几何形状对静电放电器件电性能的影响。结构几何形状的优化使ESD保护器件尺寸缩小，并进一步改善其主要电气参数。

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Analysis of the geometry on robustness of ESD protection devices

The analysis of the ESD protection devices supported by the advanced 2-D and 3-D mixed mode electro-thermal device and circuit simulation is presented. The influence of structure geometry on the electrical properties of ESD devices is studied. The optimization of the structure geometry allows down-shrink of the ESD protection device dimensions with further improvement of its main electrical parameters.

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2008 International Conference on Advanced Semiconductor Devices and Microsystems

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