智能电源ESD保护失效电流预测的高效TCAD方法

Proceedings. ISPSD '05. The 17th International Symposium on Power Semiconductor Devices and ICs, 2005. Pub Date : 2005-05-23 DOI:10.1109/ISPSD.2005.1487964

C. Salamero, N. Nolhier, M. Bafleur, P. Besse

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引用次数: 12

摘要

本文研究了一种基于TCAD仿真的ESD保护鲁棒性预测方法。在不同的设备和两种智能电源技术上进行了测试，并通过电气测量和故障分析验证了结果。与技术推广相比，故障电流预测总是具有较高的准确性。此外，与基于温度标准的经典方法相比，该方法提供了显着的模拟时间加速。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Efficient TCAD methodology for ESD failure current prediction of smart power ESD protection

This work deals with a method to predict ESD protection robustness with TCAD simulations. Tested on different devices and two smart power technologies, the results are validated with electrical measurement and failure analysis. Failure current is always predicted with a good accuracy compared to technology spreading. In addition, the methodology provides a significant simulation time speedup compared to classical methods based on a temperature criterion.

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Proceedings. ISPSD '05. The 17th International Symposium on Power Semiconductor Devices and ICs, 2005.

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