基于临界面积计算的冗余产量模型

Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) Pub Date : 2000-09-26 DOI:10.1109/ISSM.2000.993645

K. Mitsutake, Y. Ushiku

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引用次数: 2

摘要

为了优化冗余设计，提出了具有冗余的产量模型。该模型考虑了修复一个故障所需的精确冗余数。利用该模型计算的冗余产量与实际产量吻合较好。通过对几种冗余设计的应用，给出了获得更高成品率的指导。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Yield model with redundancy based on critical area calculations

To optimize the redundancy design, the yield model with redundancy is proposed. In this model the accurate number of redundancies to repair one fault is taken into consideration. The calculated yield with redundancy by using this model and the real one are in good agreement. As a result of the application for several redundancy designs, a guide to obtain higher yield is presented.

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来源期刊

Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)

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