用动态模拟方法优化炉膛和预洁净区的批量

IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168) Pub Date : 1998-09-23 DOI:10.1109/ASMC.1998.731643

H. Rulkens, E.J.J. Van Campen, J. van Herk, J. Rooda

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引用次数: 21

摘要

动态仿真模型是分析现有生产状况和通过评估备选调度规则来优化生产性能的一种强大而快速的工具。本文对某晶圆厂的炉体和预洁净区进行了分析和优化。描述了动态模型的设计。此外，实验说明了最小批大小调度规则的影响。针对特定的生产情况，确定了优化周期时间的每道炉工序的最小批量。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Batch size optimization of a furnace and pre-clean area by using dynamic simulations

A dynamic simulation model is a powerful and fast tool to analyze existing production situations and to optimize the performance by evaluating alternative scheduling rules. This paper presents such an analysis and optimization for a furnace and pre-clean area of a wafer fab. The design of a dynamic model is described. Furthermore, experiments are described that illustrate the influence of a minimum batch size scheduling rule. For a specific production situation, the minimum batch sizes per furnace process which optimize cycle time are determined.

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来源期刊

IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168)

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