通过嵌入Pt纳米晶体改善无形成TiO2−x基器件的电阻开关均匀性

P. Bousoulas, D. Sakellaropoulos, J. Giannopoulos, D. Tsoukalas
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引用次数: 5

摘要

系统地研究了含不同直径Pt纳米晶的TiN/Ti/TiO2-x/Au器件的电阻开关特性。我们证明了与Pt纳米晶嵌入器件相比,在均匀性和放大开关比方面得到了重要的增强。我们的研究结果表明,TiO2-x器件的开关特性与导电丝在介电层内生长的控制密切相关,这源于纳米晶体附近电场的局部增强。这种效应与室温制造工艺和薄膜的自由形成性质相结合,被认为是电阻式随机存取存储器设计的优化途径。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Improving the resistive switching uniformity of forming-free TiO2−x based devices by embedded Pt nanocrystals
The resistive switching characteristics of TiN/Ti/TiO2-x/Au devices containing Pt nanocrystals with different diameters, were systematically investigated. We demonstrate that comparing the reference with the Pt nanocrystals embedded devices, important enhancement of switching characteristics is obtained, in terms of uniformity and enlarged switching ratio. Our results indicate that the switching characteristics of TiO2-x device are very strongly related with the control of conductive filaments' growth within the dielectric layer, which stems from the local enhancement of the electric field in the vicinity of nanocrystals. This effect in conjunction with the room temperature fabrication process and the forming free nature of the thin films is considered as an optimization route of resistive random access memory design.
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