Yanlin Wu, Muqin Nuo, Junjie Yang, Zheyang Zheng, Li Zhang, K. J. Chen, M. Hua, Y. Hao, Xuelin Yang, B. Shen, Maojun Wang, Jin Wei
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引用次数: 0
摘要
研究了e模主动钝化p-GaN栅极HEMT (AP- HEMT)的动态稳定性,包括动态V_{\text{th}}$移位、动态R_{\text{ON}}$退化和动态漏电流。AP-HEMT具有欧姆型栅极/p-GaN接触,由于避免了与浮动p-GaN层相关的电荷存储效应,因此可以产生稳定的动态$V_{\text{th}}$。在650- V $V_{\text{DS}}$应力下,AP- HEMT表现出较低的动态$R_{\text{ON}}$/静态$R_{\text{ON}}$比值,为1.4,这可归因于p-GaN主动钝化层的存在,该钝化层屏蔽了表面陷阱的影响。由于空穴降低了缓冲层的能量势垒,p-GaN栅极HEMT中的空穴注入有望增加动态off状态泄漏电流。尽管注入面积较大,AP-HEMT表现出较低的动态泄漏电流增长,这是由于电场峰值从栅极边缘向漏极移动所致。这种重新安置抑制了闸下能量势垒的降低。总的来说,AP-HEMT独特的器件结构导致动态$V_{\text{th}}$移位可以忽略,动态$R_{\text{ON}}$很小,关闭状态动态泄漏增加很小。
High Dynamic Stability in Enhancement-Mode Active-Passivation p-GaN Gate HEMT
The dynamic stability of E-mode active-passivation p-GaN gate HEMT (AP- HEMT) is investigated, including dynamic $V_{\text{th}}$ shift, dynamic $R_{\text{ON}}$ degradation, and dynamic leakage current. The AP-HEMT features an ohmic-type gate/p-GaN contact that results in a stable dynamic $V_{\text{th}}$, as the charge storage effect associated with the floating p-GaN layer is avoided. At a 650- V $V_{\text{DS}}$ stress, the AP- HEMT exhibits a low dynamic $R_{\text{ON}}$/static $R_{\text{ON}}$ ratio of 1.4, which can be attributed to the presence of the p-GaN active-passivation layer that screens the influence of surface traps. The hole injection in the p-GaN gate HEMT is expected to increase the dynamic OFF-state leakage current, as the holes reduce the energy barrier of the buffer layer. Despite a larger injector area, the AP-HEMT exhibits a lower dynamic leakage current increase, which is due to the relocation of the electric field peak from the gate edge towards the drain. This relocation suppresses the lowering of the energy barrier under the gate. Overall, the unique device structure of the AP-HEMT leads to a negligible dynamic $V_{\text{th}}$ shift, a low dynamic $R_{\text{ON}}$, and a small OFF-state dynamic leakage increase.