光谱表面等离子体共振在气体压力传感中的应用

H. Ho, C. L. Wong
{"title":"光谱表面等离子体共振在气体压力传感中的应用","authors":"H. Ho, C. L. Wong","doi":"10.1109/HKEDM.2002.1029160","DOIUrl":null,"url":null,"abstract":"A pressure sensor based on the spectral response associated with the surface plasmon resonance (SPR) occurring on a 50 nm gold surface is described. The operation of the device relies on the fact the refractive index of a gas changes with pressure. Since the conditions for SPR is extremely sensitive to refractive index variations, the pressure of the gas exposed to the sensor surface can be detected. In our spectral SPR sensor, such refractive index change leads to a shift in the spectral dip in the SPR curve. Experiments performed on nitrogen gas at room temperature has demonstrated that our trial setup has a sensitivity threshold of 8.33/spl times/10/sup -4/ RI units, which corresponds to a pressure change of 6.3 psi. We expect that further improvement may be possible if we use better spectral signal processing algorithm to locate the spectral dip with higher degree of accuracy.","PeriodicalId":154545,"journal":{"name":"Proceedings 2002 IEEE Hong Kong Electron Devices Meeting (Cat. No.02TH8616)","volume":"155 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"Application of spectral surface plasmon resonance for gas pressure sensing\",\"authors\":\"H. Ho, C. L. Wong\",\"doi\":\"10.1109/HKEDM.2002.1029160\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A pressure sensor based on the spectral response associated with the surface plasmon resonance (SPR) occurring on a 50 nm gold surface is described. The operation of the device relies on the fact the refractive index of a gas changes with pressure. Since the conditions for SPR is extremely sensitive to refractive index variations, the pressure of the gas exposed to the sensor surface can be detected. In our spectral SPR sensor, such refractive index change leads to a shift in the spectral dip in the SPR curve. Experiments performed on nitrogen gas at room temperature has demonstrated that our trial setup has a sensitivity threshold of 8.33/spl times/10/sup -4/ RI units, which corresponds to a pressure change of 6.3 psi. We expect that further improvement may be possible if we use better spectral signal processing algorithm to locate the spectral dip with higher degree of accuracy.\",\"PeriodicalId\":154545,\"journal\":{\"name\":\"Proceedings 2002 IEEE Hong Kong Electron Devices Meeting (Cat. No.02TH8616)\",\"volume\":\"155 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-11-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings 2002 IEEE Hong Kong Electron Devices Meeting (Cat. No.02TH8616)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/HKEDM.2002.1029160\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings 2002 IEEE Hong Kong Electron Devices Meeting (Cat. No.02TH8616)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/HKEDM.2002.1029160","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 11

摘要

描述了一种基于与50 nm金表面等离子体共振(SPR)相关的光谱响应的压力传感器。该装置的工作依赖于气体的折射率随压力变化这一事实。由于SPR的条件对折射率变化非常敏感,因此可以检测到暴露在传感器表面的气体压力。在我们的光谱SPR传感器中,这种折射率的变化导致SPR曲线的光谱倾角发生移位。在室温下对氮气进行的实验表明,我们的试验装置具有8.33/spl倍/10/sup -4/ RI单位的灵敏度阈值,对应于6.3 psi的压力变化。我们期望,如果我们使用更好的光谱信号处理算法,以更高的精度定位光谱倾角,可能会有进一步的改进。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Application of spectral surface plasmon resonance for gas pressure sensing
A pressure sensor based on the spectral response associated with the surface plasmon resonance (SPR) occurring on a 50 nm gold surface is described. The operation of the device relies on the fact the refractive index of a gas changes with pressure. Since the conditions for SPR is extremely sensitive to refractive index variations, the pressure of the gas exposed to the sensor surface can be detected. In our spectral SPR sensor, such refractive index change leads to a shift in the spectral dip in the SPR curve. Experiments performed on nitrogen gas at room temperature has demonstrated that our trial setup has a sensitivity threshold of 8.33/spl times/10/sup -4/ RI units, which corresponds to a pressure change of 6.3 psi. We expect that further improvement may be possible if we use better spectral signal processing algorithm to locate the spectral dip with higher degree of accuracy.
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