倒装芯片应用的衬垫再分配技术

C. Tsui, Y. Huang, J.H. Wu
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引用次数: 3

摘要

倒装芯片的应用通常涉及器件芯片和不同基板之间的焊点互连。在大多数情况下,设备芯片上的I/O需要重新定位到新的格式,如区域阵列,以匹配衬底上相应的焊盘位置。在本文中,我们描述了焊盘再分配技术的一种实现,使用铝互连线,光敏聚酰亚胺绝缘层和可湿的凹凸下金属化层(UBM)用于随后的焊接凹凸应用。制作了采用倒装芯片板载(FCOB)组件的试验车,并进行了热循环可靠性试验。应用一个实用的仿真模型来了解FCOB焊点可靠性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Pad redistribution technology for flip chip applications
Flip chip applications typically involve solder joint interconnections between the device chip and different substrates. In most cases, the I/O's on the device chip require to be relocated to a new format such as area array in order to match the corresponding pad locations on the substrate. In this paper, we describe one implementation of the pad redistribution technology, using aluminium interconnect lines, a photosensitive polyimide insulating layer and a wettable layer of underbump metallization (UBM) for the subsequent solder bumping applications. A test vehicle employing the flip chip on board (FCOB) assembly was fabricated and subjected to the thermal cycling reliability test. A useful simulation model was applied to understand the solder joint reliability in FCOB.
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