Hung-Chih Chang, P. Chen, Fu-Liang Yang, C. W. Liu
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引用次数: 0
摘要
二维(2-D)材料由于其完美的静电控制,是超薄体(UTB)器件的完美通道。石墨烯是最著名的二维材料,具有高迁移率但缺乏带隙。为了克服石墨烯基晶体管的不足,具有本征带隙(1eV~2eV)的二维单层过渡金属二硫族化合物(TMD)受到了广泛的关注。MoS2有望成为所有TMD材料中用于UTB fet [1] b[2]通道的有前途的候选材料之一。应变技术实际上负责改变硅中的能带结构以提高器件性能。通过对二维材料进行适当的应变工程,可以实现高性能晶体管新工艺的实现。
Strain response of monolayer MoS2 in the ballistic regime
Two-dimensional (2-D) materials are perfect channels for ultra thin body (UTB) device due to the perfect electrostatic control. Graphene is the most well-known 2-D material with high mobility but lack of bandgap. To overcome the shortage of graphene-based transistors, 2-D monolayer transition metal dichalcogenides (TMD) with intrinsic bandgap (1eV~2eV) have drawn much attention. MoS2 is expected to be one of the promising candidates among all TMD materials for the channels of UTB FETs [1][2]. Strain technology is in fact responsible for an alteration of the band structure in silicon to enhance the device performance [3]. With the appropriate strain engineering on the 2-D materials, the implementation to novel technology process of high performance transistor could be realized.