自动故障定位使用电子束和LSI测试仪

Proceedings of 1993 IEEE 2nd Asian Test Symposium (ATS) Pub Date : 1993-11-16 DOI:10.1109/ATS.1993.398814

N. Itazaki, T. Sumioka, S. Kajihara, K. Kinoshita

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引用次数: 9

摘要

在本文中，我们提出了一种将电子束测试仪与传统的LSI测试仪结合起来进行故障定位的方法。该方法将Cox和Rajski的矢量对故障分析方法应用于电子束测定仪的故障分析与诊断。由于电子束探测可以对超大规模集成电路进行精确观测，因此可以在较短的观测时间内获得较高的故障覆盖率

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Automatic fault location using E-beam and LSI testers

In this paper, we propose a method for locating faults using an E-beam tester together with a conventional LSI tester. This method applies the fault analysis method using vector pairs by Cox and Rajski to the analysis and diagnosis using E-beam tester. Since an accurate observation of VLSI is possible by E-beam probing, high fault coverage with a few observation time can be attained.<>

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Proceedings of 1993 IEEE 2nd Asian Test Symposium (ATS)

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