Power benefit study of monolithic 3D IC at the 7nm technology node

Monolithic 3D IC (M3D) is one potential technology to help with the challenges of continued circuit power and performance scaling. In this paper, for the first time, the power benefits of monolithic 3D IC (M3D) using a 7nm FinFET technology are investigated. The predictive 7nm Process Design Kit (PDK) and standard cell library for both high performance (HP) and low standby power (LSTP) device technologies are built based on NanGate 45nm PDK using accurate dimensional, material, and electrical parameters from publications and a commercial-grade tool flow. In addition, we implement full-chip M3D GDS layouts using both 7nm HP and LSTP cells and industry-standard physical design tools, and evaluate the resulting full-chip power, performance, and area metrics. Our study first shows that 7nm HP M3D designs outperform 7nm HP 2D designs by 16.8% in terms of iso-performance total power reduction. Moreover, 7nm LSTP M3D designs reduce the total power consumption by 14.3% compared to their 2D counterparts. This convincingly demonstrates the power benefits of M3D technologies in both high performance as well as low power future generation devices.