微型零件共焦像对准装配系统的不确定度评定

Yang Li, Xin Ye, Zhijing Zhang
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引用次数: 1

摘要

简要提出了共焦像对准装配原理,并建立了基于该对准原理的微装配系统。利用共聚焦图像对准原理,可以大大提高微装配的精度和效率。详细介绍了微装配系统的组成。激光扫描共聚焦显微镜的检测精度可达到亚微米级。不确定度是装配系统的一个重要评价指标。由此计算并得到了微装配系统的装配偏差不确定度。对于精密微装配来说,不确定度的值有点大。因此,必须对系统进行校准,并对元件的误差进行补偿。这样可以大大降低装配误差。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Uncertainty evaluation of a confocal image alignment assembly system for miniature parts
The confocal image alignment assembly principle is briefly proposed and the micro-assembly system based on this alignment principle is set up. The confocal image alignment principle can greatly improve the accuracy and efficiency of the micro-assembly. The composition of micro-assembly system is introduced in detail. The detection accuracy of the laser scanning confocal microscope can reach the submicron level. The uncertainty is a significant assessment criterion of an assembly system. So the assembly deviation uncertainty of the micro-assembly system is calculated and obtained. The value of the uncertainty is a little big for precise micro-assembly. So the system has to be calibrated and the errors of the components should be compensated. Then the error of the assembly can be reduced a lot.
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