从模型系统的机理研究中裁剪用于传感非含氢物质的场效应气体传感器

M. Andersson, A. Lloyd Spetz
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引用次数: 6

摘要

为了了解场效应气体传感器对非含氢物质(如O2, NO和CO)的敏感性的转导机制,研究了一些概念上不同的模型传感器暴露于这些以及含氢气体时的传感器信号特性。基于MOS电容的模型传感器采用不同的绝缘体和触点材料组合,如MgO, LaF3, IrO2等。在不同条件下的测试气体暴露过程中,传感器下游的气体成分也通过质谱(MS)进行了研究,并对不同模型系统进行了比较。将结果与普通SiC/SiO2/Pt结构的特性进行了比较,并从获得的信息中获得了一个专门用于氧传感的场效应传感器结构,据我们所知,首次在H2, CO和碳氢化合物的干扰最小的情况下进行了测试,并取得了令人满意的结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Tailoring of field effect gas sensors for sensing of nonhydrogen containing substances from mechanistic studies on model systems
To gain knowledge about the transduction mechanisms involved in the sensitivity of field effect gas sensors towards non-hydrogen containing substances, such as O2, NO and CO, the sensor signal characteristics during exposure of some conceptually different model sensors to these as well as hydrogen containing gases have been investigated. The MOS capacitor based model sensors employ different combinations of insulator and contact materials, such as MgO, LaF3, IrO2 etc. The gas composition downstream of the sensor during test gas exposure at various conditions has also been studied by mass spectrometry (MS) and compared for the different model systems. The results have been compared to the characteristics of ordinary SiC/SiO2/Pt structures and from the information obtained a tailor made field effect sensor structure for oxygen sensing, to our knowledge for the first time with minimal interference from H2, CO, and hydrocarbons, has been tested with promising results.
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