真正的三维结构，由激光化学加工

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers Pub Date : 1991-06-24 DOI:10.1109/SENSOR.1991.148926

H. Westberg, M. Boman, S. Johansson, J. Schweitz

{"title":"真正的三维结构，由激光化学加工","authors":"H. Westberg, M. Boman, S. Johansson, J. Schweitz","doi":"10.1109/SENSOR.1991.148926","DOIUrl":null,"url":null,"abstract":"A method for microfabrication of 3-D structures in free-space is presented. Laser-assisted chemical vapor deposition (LCVD) is used to grow a material at the point where the laser beam locally heats the substrate. This is done by moving a substrate perpendicularly relative to a laser beam by a micropositioning system, i.e. 3-D shapes can be created. The smallest structures that can be grown with this technique are about 1 mu m. Amorphous boron rods and crystalline boron springs have been manufactured as examples of micromechanical building units. The rods have a modulus of elasticity of 420-450 GPa, a fracture strain of 2.7-3.7%, and a fracture stress of 12-17 GPa. By development of the process more or less arbitrary details can be tailored for various applications.<<ETX>>","PeriodicalId":273871,"journal":{"name":"TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1991-06-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"16","resultStr":"{\"title\":\"Truly three dimensional structures microfabricated by laser chemical processing\",\"authors\":\"H. Westberg, M. Boman, S. Johansson, J. Schweitz\",\"doi\":\"10.1109/SENSOR.1991.148926\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A method for microfabrication of 3-D structures in free-space is presented. Laser-assisted chemical vapor deposition (LCVD) is used to grow a material at the point where the laser beam locally heats the substrate. This is done by moving a substrate perpendicularly relative to a laser beam by a micropositioning system, i.e. 3-D shapes can be created. The smallest structures that can be grown with this technique are about 1 mu m. Amorphous boron rods and crystalline boron springs have been manufactured as examples of micromechanical building units. The rods have a modulus of elasticity of 420-450 GPa, a fracture strain of 2.7-3.7%, and a fracture stress of 12-17 GPa. By development of the process more or less arbitrary details can be tailored for various applications.<<ETX>>\",\"PeriodicalId\":273871,\"journal\":{\"name\":\"TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1991-06-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"16\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.1991.148926\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.1991.148926","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 16

摘要

提出了一种自由空间三维结构的微加工方法。激光辅助化学气相沉积(LCVD)用于在激光束局部加热衬底的点上生长材料。这是通过微定位系统相对于激光束垂直移动基板来完成的，即可以创建3-D形状。用这种技术可以生长的最小结构约为1 μ m。无定形硼棒和结晶硼弹簧已被制造成微机械建筑单元的例子。杆的弹性模量为420 ~ 450 GPa，断裂应变为2.7 ~ 3.7%，断裂应力为12 ~ 17 GPa。通过过程的开发，或多或少的任意细节可以为各种应用量身定制。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Truly three dimensional structures microfabricated by laser chemical processing

A method for microfabrication of 3-D structures in free-space is presented. Laser-assisted chemical vapor deposition (LCVD) is used to grow a material at the point where the laser beam locally heats the substrate. This is done by moving a substrate perpendicularly relative to a laser beam by a micropositioning system, i.e. 3-D shapes can be created. The smallest structures that can be grown with this technique are about 1 mu m. Amorphous boron rods and crystalline boron springs have been manufactured as examples of micromechanical building units. The rods have a modulus of elasticity of 420-450 GPa, a fracture strain of 2.7-3.7%, and a fracture stress of 12-17 GPa. By development of the process more or less arbitrary details can be tailored for various applications.<>

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

自引率

0.00%

发文量