多孔硅微加工压阻式质量流量传感器特性研究

Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) Pub Date : 1900-01-01 DOI:10.1109/imnc.2000.872632

Dong-Kwon Kim, Sung-Gyu Kang, Jeong-Yong Park, Jun-Hwan Sim, Jang-Kyoo Shin, Pyung Choi, Jong-Hyun Lee

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引用次数: 4

摘要

采用[100]、n/n+/n三层硅片制备了四种不同微悬臂结构的压阻式流量传感器，并对其特性进行了研究。

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Characteristics of piezoresistive mass flow sensor fabricated by porous silicon micromachining

Piezoresistive flow sensors with four different types of microcantilever structures were fabricated using [100], n/n+/n three-layer silicon wafer and their characteristics were investigated.

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来源期刊

Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)

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