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引用次数: 1
摘要
提出了一种具有良好长期稳定性的高灵敏度磁传感器。我们修改了传统的全电感交流惠斯通电桥,将两个电感对耦合在交叉耦合配置中,使其尺寸减半,灵敏度加倍,同时保持完全差分输出,减少共模诱导偏移和漂移。该传感器采用65nm块体CMOS工艺,集成了激励和接收电路。它的工作频率在770MHz和1.45GHz之间,有效传感面积为200 μ m × 200 μ m,并且可靠地连续检测单个4.5 μ m磁标签珠,在时间周期内没有明显的漂移,特别是比以前报道的工作更长。据我们所知,这是第一个使用完全对称、增益增强和全电感耦合桥电路的磁传感器演示。
A Coupled Inductive Bridge for Magnetic Sensing Applications
A highly-sensitive magnetic sensor with excellent long-term stability is presented. We modify a conventional all-inductor AC Wheatstone Bridge by coupling two inductor pairs in a cross-coupled configuration which halves its size and doubles its sensitivity, while maintaining a fully differential output that reduces common-mode induced offset and drift. The sensor was fabricated with integrated excitation and receiver circuitry in a 65nm bulk CMOS process. It operates between 770MHz and 1.45GHz, has an effective sensing area of 200µm × 200µm, and reliably and continuously detects single 4.5µm magnetic label beads without significant drift over time periods notably longer than previously reported works. To our best knowledge, this is the first demonstration of a magnetic sensor using a fully symmetric, gain enhanced, and all-inductor coupled bridge circuit.