扫描电子显微镜图像处理技术

2019 International Semiconductor Conference (CAS) Pub Date : 2019-10-01 DOI:10.1109/SMICND.2019.8924031

O. Tutunaru, R. Pascu

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引用次数: 0

摘要

扫描电镜图像中噪声含量的量化是信噪比的一个重要参数。扫描电镜图像中最常见的噪声类型是高斯噪声。我们比较了不同的降噪滤波器，如平均，中值，高斯平滑和维纳滤波器，以看到图像的改善。根据实验结果，最有前途的是Wienerfilter。

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Image processing technology for scanning electron microscopy

Quantification of the noise content in the scanning electron microscope image is an important parameter in the signal-to-noise ratio. The most common type of noise in SEM image is the Gaussian noise. We compared different noise reduction filters, like average, median, Gaussian Smoothing and Wiener filters, in order to see the image improvement. Based on the experiment results the most promising is the Wienerfilter.

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2019 International Semiconductor Conference (CAS)

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