深亚微米locos定义的SOI光子线波导

8th IEEE International Conference on Group IV Photonics Pub Date : 2011-11-01 DOI:10.1109/GROUP4.2011.6053779

A. Tam, M. Ibrahim, B. Lamontagne, N. G. Tarr, W. Ye, S. Janz, Danxia Xu

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引用次数: 1

摘要

用于形成SOI光波导的LOCOS技术已扩展到使用非常简单的工艺生产深亚微米尺寸的低损耗光子线通道波导。

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Deep submicron LOCOS-defined SOI photonic wire waveguides

The LOCOS technique for formation of SOI optical waveguides has been extended to produce low-loss photonic wire channel waveguides with deep submicron dimensions using a very simple process.

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8th IEEE International Conference on Group IV Photonics

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