用于表征洛伦兹力MEMS磁强计的测试装置

2020 27th IEEE International Conference on Electronics, Circuits and Systems (ICECS) Pub Date : 2020-11-23 DOI:10.1109/ICECS49266.2020.9294898

J. M. Sánchez-Chiva, D. Fernández, J. Madrenas

{"title":"用于表征洛伦兹力MEMS磁强计的测试装置","authors":"J. M. Sánchez-Chiva, D. Fernández, J. Madrenas","doi":"10.1109/ICECS49266.2020.9294898","DOIUrl":null,"url":null,"abstract":"Lorentz-force Microelectromechanical Systems (MEMS) magnetometers have been proposed to replace magnetometers in current consumer electronics products. As a result, there exist numerous works that propose MEMS transducers and readout systems. However, when it comes to the characterization of MEMS devices, a wide variety of strategies and instruments are used, making it difficult to compare results from different works. In this article, a test setup for the characterization of Lorentz-force MEMS magnetometers is proposed. The solution in based in the use of an impedance analyser along with a simple and flexible circuit that provides the in-phase driving of the voltage and the current of the MEMS. The proposed solution has been successfully used to characterize MEMS magnetometers with very different characteristics.","PeriodicalId":404022,"journal":{"name":"2020 27th IEEE International Conference on Electronics, Circuits and Systems (ICECS)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"A test setup for the characterization of Lorentz-force MEMS magnetometers\",\"authors\":\"J. M. Sánchez-Chiva, D. Fernández, J. Madrenas\",\"doi\":\"10.1109/ICECS49266.2020.9294898\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Lorentz-force Microelectromechanical Systems (MEMS) magnetometers have been proposed to replace magnetometers in current consumer electronics products. As a result, there exist numerous works that propose MEMS transducers and readout systems. However, when it comes to the characterization of MEMS devices, a wide variety of strategies and instruments are used, making it difficult to compare results from different works. In this article, a test setup for the characterization of Lorentz-force MEMS magnetometers is proposed. The solution in based in the use of an impedance analyser along with a simple and flexible circuit that provides the in-phase driving of the voltage and the current of the MEMS. The proposed solution has been successfully used to characterize MEMS magnetometers with very different characteristics.\",\"PeriodicalId\":404022,\"journal\":{\"name\":\"2020 27th IEEE International Conference on Electronics, Circuits and Systems (ICECS)\",\"volume\":\"2 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-11-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 27th IEEE International Conference on Electronics, Circuits and Systems (ICECS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICECS49266.2020.9294898\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 27th IEEE International Conference on Electronics, Circuits and Systems (ICECS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICECS49266.2020.9294898","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 5

摘要

洛伦兹力微机电系统(MEMS)磁强计已被提议取代目前消费电子产品中的磁强计。因此，有许多工作提出MEMS传感器和读出系统。然而，当涉及到MEMS器件的表征时，使用了各种各样的策略和仪器，因此很难比较不同工作的结果。本文提出了一种用于表征洛伦兹力MEMS磁强计的测试装置。该解决方案基于使用阻抗分析仪以及一个简单而灵活的电路，该电路提供了MEMS电压和电流的同相驱动。所提出的解决方案已成功地用于表征具有非常不同特性的MEMS磁强计。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A test setup for the characterization of Lorentz-force MEMS magnetometers

Lorentz-force Microelectromechanical Systems (MEMS) magnetometers have been proposed to replace magnetometers in current consumer electronics products. As a result, there exist numerous works that propose MEMS transducers and readout systems. However, when it comes to the characterization of MEMS devices, a wide variety of strategies and instruments are used, making it difficult to compare results from different works. In this article, a test setup for the characterization of Lorentz-force MEMS magnetometers is proposed. The solution in based in the use of an impedance analyser along with a simple and flexible circuit that provides the in-phase driving of the voltage and the current of the MEMS. The proposed solution has been successfully used to characterize MEMS magnetometers with very different characteristics.

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来源期刊

2020 27th IEEE International Conference on Electronics, Circuits and Systems (ICECS)

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