{"title":"多工序、产品和机器控制图在半导体中的应用","authors":"C. J. Wu, J. Wei","doi":"10.1109/ISSM.2018.8651131","DOIUrl":null,"url":null,"abstract":"For foundry factories, the different products have their respective spec in foundry factories, so we standardize it and monitor the process performance by multi-process, multi-products and multi-machine. The standardized control chart can solve the control problems of Shewhart control chart in high-mix and low-volume products, and combine with different products, machines, and process layers. It can also be used in LtL/WtW/WiW to get the variations of these sources immediately.","PeriodicalId":262428,"journal":{"name":"2018 International Symposium on Semiconductor Manufacturing (ISSM)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Multi-Process, Products and Machine Control Chart Application in Semiconductors\",\"authors\":\"C. J. Wu, J. Wei\",\"doi\":\"10.1109/ISSM.2018.8651131\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"For foundry factories, the different products have their respective spec in foundry factories, so we standardize it and monitor the process performance by multi-process, multi-products and multi-machine. The standardized control chart can solve the control problems of Shewhart control chart in high-mix and low-volume products, and combine with different products, machines, and process layers. It can also be used in LtL/WtW/WiW to get the variations of these sources immediately.\",\"PeriodicalId\":262428,\"journal\":{\"name\":\"2018 International Symposium on Semiconductor Manufacturing (ISSM)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 International Symposium on Semiconductor Manufacturing (ISSM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISSM.2018.8651131\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 International Symposium on Semiconductor Manufacturing (ISSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2018.8651131","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Multi-Process, Products and Machine Control Chart Application in Semiconductors
For foundry factories, the different products have their respective spec in foundry factories, so we standardize it and monitor the process performance by multi-process, multi-products and multi-machine. The standardized control chart can solve the control problems of Shewhart control chart in high-mix and low-volume products, and combine with different products, machines, and process layers. It can also be used in LtL/WtW/WiW to get the variations of these sources immediately.