多工序、产品和机器控制图在半导体中的应用

C. J. Wu, J. Wei
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引用次数: 0

摘要

对于铸造工厂来说,不同的产品在铸造工厂都有各自的规格,因此我们对其进行标准化,并通过多工序、多产品、多机器来监控工艺性能。标准化控制图可以解决休哈特控制图在高混合、小批量产品中的控制问题,并与不同的产品、机器、工艺层相结合。它也可以在LtL/WtW/WiW中使用,以立即获得这些源的变体。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Multi-Process, Products and Machine Control Chart Application in Semiconductors
For foundry factories, the different products have their respective spec in foundry factories, so we standardize it and monitor the process performance by multi-process, multi-products and multi-machine. The standardized control chart can solve the control problems of Shewhart control chart in high-mix and low-volume products, and combine with different products, machines, and process layers. It can also be used in LtL/WtW/WiW to get the variations of these sources immediately.
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