在线诊断和支持是过程模块控制的关键部分

Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) Pub Date : 2000-09-26 DOI:10.1109/ISSM.2000.993655

M. Locy

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引用次数: 2

摘要

半导体行业需要一种新的服务方式。目前的设备支持实施未能满足设备供应商和半导体制造商的行业要求。这项工作考察了“电子诊断”作为一种可行的(如果没有必要的话)支持交付方法的发展、影响和方向。

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On line diagnostics and support as a key part of process module control

A new method of service delivery in the semiconductor industry is required. Current equipment support implementations fail to address the requirements of the industry for both the equipment supplier and the semiconductor manufacturer. This work examines the development, impact, and direction of "e-diagnostics" as a viable, if not necessary, method of support delivery.

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Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)

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