表面声波作为一种在线检测低k介质加工损伤的技术

Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005. Pub Date : 2005-06-06 DOI:10.1109/IITC.2005.1499988

F. Iacopi, S. Brongersma, A. Mazurenko, H. Struyf, G. Mannaert, Y. Travaly, A. Maznev, T. Abell, J. Tower, K. Maex

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引用次数: 2

摘要

表面声波技术被成功地应用于监测低k介电体在非破坏性和非接触方式下的变形/损伤。结果表明，该技术可用于评估和比较由于不同加工条件导致的图案化结构中的介电损伤。

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Surface acoustic waves as a technique for in-line detection of processing damage to low-k dielectrics

A surface acoustic wave technique was successfully applied for monitoring modification/damage of low-k dielectrics resulting from plasma-based patterning in a non-destructive and non-contact fashion. It is shown that this technique can be used to assess and compare dielectric damage, due to different processing conditions, in patterned structures.

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Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005.

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