MEMS电容开关中的介电充电和热激活过程

2009 European Microwave Integrated Circuits Conference (EuMIC) Pub Date : 2009-09-01 DOI:10.23919/eumc.2009.5296573

G. Papaioannou, N. Tavasolian, C. Goldsmith, J. Papapolymerou

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引用次数: 5

摘要

研究了以SiO2为介质材料的电容式射频MEMS开关的介电充电效应。为了整合和更好地理解充电历史，实现了两种不同的驱动方案。实验结果表明，无论何种驱动方式，充电原则上都是热的，并且活化能随电压扫描速率的增加而减小。

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Dielectric charging and thermally activated processes in MEMS capacitive switches

The paper investigates dielectric charging effects for capacitive RF MEMS switches with SiO2 as the dielectric material. Two different actuation schemes are implemented in order to incorporate and better understand the charging history over time. Experimental results indicate that regardless of the actuation scheme the charging is thermally in principle, and that the activation energy decreases as the voltage sweep rate increases.

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2009 European Microwave Integrated Circuits Conference (EuMIC)

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