非电量的非对称比例传感器

2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595) Pub Date : 2002-08-07 DOI:10.1109/MIEL.2002.1003179

V. Tvarozek, Z. Řezníček, A. Jakubec, I. Novotný

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引用次数: 1

摘要

介绍了一种用于测量非电量变化(如温差)的新型非对称比电阻法。在该方法的基础上，开发了具有高精度(相对误差/spl les//spl plusmn/0.1%)和灵敏度可调到所需值(C/sub /= -500 ppm//spl度/C)的组合温度传感器。这一原理适用于热生物传感器、微电化学传感器以及各种物理微传感器。

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Asymmetric ratio sensors of nonelectric quantities

A novel asymmetric ratio resistance method for the measuring of nonelectric quantity changes, e.g. temperature differences, is introduced. On the basis of that method the combined temperature sensor has been developed with high accuracy (relative error /spl les//spl plusmn/0.1%) and sensitivity adjustable to the desired value (C/sub r/= -500 ppm//spl deg/C). This principle is applicable in thermal biosensors as well as in microelectrochemical sensors and also in various physical microsensors.

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来源期刊

2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)

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